| 摘要 |
<p>PROBLEM TO BE SOLVED: To highly precisely position a sheet-like substrate without being deflected. SOLUTION: Two position sensors 15, 16 are arranged at a prescribed interval along the side direction of the major side of a substrate 1, a position sensor 17 is arranged on the minor side of the substrate 1 and a difference between the position of the substrate 1 obtained on the basis of respective detection signals outputted from these sensors 15 to 17 and a reference position is found out. A correction variable operation part 23 calculates a correction variable for moving the substrate 1 to the reference position on the basis of the difference and a stage driving part 24 drives an XYθstage 12 to position the substrate 1 always at the reference position.</p> |
