| 摘要 |
PROBLEM TO BE SOLVED: To realize high-speed and accurate AF control. SOLUTION: This system is provided with an active AF light receiving system 20 receiving an optical image concerning the reflection film of a glass sample and an active AF control means performing focusing control to the reflection film based on output from the system 20, and a passive AF light receiving system 40 receiving contrast information being the optical image concerning the sample and a passive AF control means performing the focusing control to the sample based on the output from the system 40. The active AF control means suitable for high-speed operation and the passive AF control means capable of accurately observing the sample are switched and used based on the output from the respective light receiving systems. |
