摘要 |
PROBLEM TO BE SOLVED: To accurately carry out judgment by a data processing program, to improve the reliability of a qualitative analysis result, and to simplify confirmation work after outputting the qualitative analysis result by preventing improper judgment caused by a coexisting element and a molecular ion when performing qualitative analysis in a plasma ion source mass spectrometry device. SOLUTION: In the method, information on the mass number interference between elements and the interference of a molecular ion is provided on a data processing program in advance, judgment is accurately made, grouping is made according to the precision of the element where a measurement result may exist, and for example a mass spectrum is displayed, thus accurately judging the result of qualitative analysis, minimizing time and labor required for confirmation work after the result is outputted, and hence improving the reliability of a qualitative result.
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