| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch sensor, capable of measuring the micro-surface shape by preventing the occurrence of harmful bending vibration in the axial direction of a stylus. SOLUTION: A stylus 1 has a structure substantially symmetrical in the axial direction. Stylus side support parts 10-13 of support members 6-9 for connecting the stylus 1 and a stylus holder 5 are plural portions symmetrical in the axial direction of the stylus about the center 3 of gravity of the stylus, and further they are plural portions symmetrical in the axis 4 of the stylus in each portion. The center of gravity of the support member of each set in the same axial portion of the stylus is substantially on the axis. At least one of a vibration exciting means 31 and a detecting means 32 is provided so as to be bridged between at least two portions on the stylus which have the same distance from the center 3 of gravity.
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