| 摘要 |
PURPOSE: A wafer cassette having a front door with an insertion cavity for an identification card is provided to enable an efficient management of wafer fabrication processes. CONSTITUTION: The wafer cassette(100) includes a cassette body(110) in which at least one wafer(WF) is horizontally inserted, and the front door(120) detachable from the cassette body(110) to load or unload the wafer(WF). The front door(120) has the insertion cavity(123) where the identification card(200) is inserted. The identification card(200) has two parts, namely, a bar code part indicating an identification number of the cassette(100) and a data recorded part on which data on proceeding states of the wafer fabrication processes are recorded. Another insertion hole for the identification card(200) is also formed on the rear of the cassette body(110). The front door(120) further has an insertion hole(121) for facilitating a detachment of the front door(120), and a key hole(122) for allowing the detachment. When the wafer cassette(100) is supplied for one of the processes, the identification card(200) is read by a reader installed in an apparatus for the process.
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