FIELD EMISSION ARRAY WITH METAL SILICIDE TIP AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A field emission array with a metal silicide tip and a method for manufacturing the same are provided to form a metal silicide tip by depositing a silicon on a metal field emission tip. CONSTITUTION: A field emission array with a metal silicide tip and a method for manufacturing the same comprises a conductive substrate(11), an insulating layer(12), a metal layer(13), a cavity portion(20), and a cone-shaped metal tip(16). The insulating layer(12) is formed on the conductive substrate(11). The metal layer(13) is covers the insulating layer(12). The cavity portion(20) is formed between the insulating layer(12) and the metal layer(13). The cone-shaped metal layer(16) is formed at the cavity portion(20). A metal silicide portion is formed at the cone-shaped metal tip(16).