STRUCTURAL BODY FOR CATHODE

摘要

PROBLEM TO BE SOLVED: To provide a structural body for a cathode with improved reliability that can prevent peel-off of bonding areas without deteriorating such characteristics as small thickness and power saving. SOLUTION: A heater unit of this structural body for a cathode comprises an insulation board 32 formed of anisotropic boron nitride, wherein a heater pattern 33 formed of layer-shaped anisotropic graphite is formed on one side of the insulation board, and a layer-shaped anisotropic graphite layer is formed on the other side thereof. A terminal port 33a of the heater pattern has a plurality of included surfaces 24 which are inclined against the anisotropic graphite surface, a heater terminal formed of a metal is bonded to the terminal with a wax material. The anisotropic graphite layer has a plurality of includes surfaces which incline against the surface of the anisotropic graphite layer. A body of a cathode base is formed on the anisotropic graphite layer.