| 摘要 |
PROBLEM TO BE SOLVED: To provide a diffused lighting system having a favorable and superior characteristic for a machine observation system, produced at low cost, and having high reliability. SOLUTION: An optical pattern controller 115 feeds optical patterns to a collimator 140. The optical pattern controller 115 has a beam deflector 130 drawing a circular optical pattern having a diameter proportional to the rotation speed. Or, the optical pattern controller comprises a two-dimensional scanning galavanometer drawing a circular optical pattern or a liquid crystal device. The collimated optical pattern is so reflected as to be substantially parallel to the optical axis of an image pick-up system 200. A condensing element 160 guides the collimated and reflected optical pattern onto a sample part 300 at an incident angle of a function of the diameter of the optical column.
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