发明名称 MEASURING DEVICE FOR LENS AND MEASURING METHOD FOR LENS
摘要 PROBLEM TO BE SOLVED: To facilitate desired measurement in a measuring device for a lens and a measuring method for a lens, by which measurement on a lens is made according to an interference fringe. SOLUTION: This measuring device is adapted to measure specific eccentricity, showing eccentricity between two faces to an aspherical lens, at least one face of which is axisymmetric aspherical surface. A diffractive optical element converts some of luminous flux emitted from a light source to a measuring luminous flux with a designated wave surface to be applied to one face of the aspherical lens and to a measuring luminous flux with a designated wave surface to be applied to the other face of the aspherical lens, and an interferometer makes a luminous flux for reference obtained by reflecting some of a luminous flux emitted from the light source on the reference surface interfere with a luminous flux for measurement, obtained by reflecting some of the luminous flux on the respective faces of the aspherical lens via a diffractive optical element to form an interference fringe to one face of the aspherical lens and an interference fringe to the other face of the aspherical lens. According to the inteference fringes, the specific eccentricity of the aspherical lens is measured.
申请公布号 JP2001091227(A) 申请公布日期 2001.04.06
申请号 JP20000011796 申请日期 2000.01.20
申请人 NIKON CORP 发明人 FUKUDA YUSUKE;YAMAMOTO TAKAHIRO;ICHIKAWA HAJIME
分类号 G01B11/24;(IPC1-7):G01B11/24 主分类号 G01B11/24
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