发明名称 WAFER BOAT
摘要 PURPOSE: A wafer boat is provided to increase the number of loaded wafers and to prevent the wafer from being gotten out at high revolution speed by minimizing a slot pitch, and to improve a deposition rate of gas and uniformity of a layer by preventing gas induced into a tube from being disturbed. CONSTITUTION: A plurality of pillars(30) are vertically installed. A plurality of supporting pins(31) are fixed in an inside of the pillars in a longitudinal direction. A guiding pin(32) is projected in an upper part of the supporting pins. The guiding pins is formed in the supporting pin as one body.
申请公布号 KR20010028021(A) 申请公布日期 2001.04.06
申请号 KR19990040058 申请日期 1999.09.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 AHN, JAE HYEOK;KIM, TAE CHEOL;YANG, CHANG JIP
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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