| 摘要 |
<p>A touch trigger probe includes a hybrib integrated circuit (58). On this circuit are provided both kinematic support elements (28) for supporting a deflectable stylus (14) in a precise rest position, and sensing elements (40) for detecting contact between the stylus (14) and a workpiece. Embodiments are also disclosed in which the kinematic support elements are provided on a silicon chip, e.g. by micro-machining.</p> |
