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发明名称
Mit Diamant bedecktes Glied und Verfahren zur Herstellung
摘要
申请公布号
DE69426336(T2)
申请公布日期
2001.04.05
申请号
DE1994626336T
申请日期
1994.03.09
申请人
CANON K.K., TOKIO/TOKYO
发明人
HIRABAYASHI, KEIJI
分类号
C30B29/04;C23C16/27;C30B25/02;C30B25/10;H01L21/205;H01L23/14
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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