| 摘要 |
An athermalized optical device includes an optical phase-array comprising a plurality of curved waveguide cores of different lengths supported on a planar waveguide, wherein each of the waveguide cores of the array includes a first silica segment (12A), a second silica segment (12B) and a central polymer segment connecting the first silica segment with the second silica segment (12B) to form a continuous waveguide core. The device is prepared by forming a plurality of adjacent curved silica waveguide cores on a planar substrate (14), overcladding the silica waveguide cores with a silica overclad, etching at least one groove into a central portion of the optical phased-array (24) through the overclad and silica waveguiding cores, forming a plurality of waveguide core segments connecting a first silica waveguide core segment with a corresponding second silica waveguide core segment (12C) to form a continous waveguide core, and overcladding the polymer waveguide core segment to define a composite optical phase-array (24).
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