| 摘要 |
PURPOSE:To enable sensitivity to be improved and reduce the cost by providing a sensor especially between surface electrodes of a ring-plate-shaped electrode holder for a gas rate sensor in expansion. CONSTITUTION:The sensor is provided with a gas pump 33 which is provided within a casing 1, allows a gas flow 33a from the gas pump 33 to at least a pair of sensors 7a and 7b which are provided at an electrode holder 5, and an angular velocity input to be detected according to a difference of signals from sensors 7a and 7b. The sensors 7a and 7b are provided in expansion among a plurality of surface electrodes 6a-6d which are formed at the electrode holder 5. |
