| 摘要 |
PURPOSE:To obtain an ion scattering analyser having a structure capable of performing the mounting and attachment of a sample to be analyzed and the feed of the sample between a vacuum chamber and other vacuum device under vacuum. CONSTITUTION:A vacuum chamber 2 having a sample arranged therein formed into a structure so as to be separated from an analyser main body 1 and capable of being mounted on the main body 1 in a freely detachable manner. A freely openable and closable door 21 for partitioning the interior and exterior of the vacuum chamber 2 in an airtight manner is provided on the mounting part of the vacuum chamber 2 on the main body 1. |
