| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-like connector, manufacturing method thereof, a semiconductor device connecting apparatus and an inspecting apparatus whereby a satisfactory electric connecting condition is surely attained, even when the pressing load on a semiconductor device to be electrically connected is low. SOLUTION: The sheet-like connector comprises through-conductive parts at positions on an insulative sheet, corresponding to projecting electrodes formed on a semiconductor device formed on the top surface of the insulative sheet. the through-conductive parts pierce in the thickness direction of the insulative sheet, protrudent conductive parts protruding upward are formed at peripheral parts of the top faces of the through-conductive parts continuously together with the through-conductive parts and if the projecting electrodes of the semiconductor device have each a semispherical shape, the protrudent conductive parts are formed such that the top faces of the through-conductive parts and a part of the protrudent conductive parts contact the semispherical surfaces at the same time.
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