| 摘要 |
<p>The apparatus generates a time-varying magnetic field through a field admission window (22) of plasma processing chamber (20) to create or sustain a plasma within the chamber by inductive coupling. It comprises: a magnetic core (38) presenting a pole face structure (38a), an inductor means (40) associated with the magnetic core, for generating a time-varying magnetic field throughout the pole face structure, means (42, 44, 48, 51) for injecting gas into said chamber and through said magnetic core.</p> |
