Sensor for atomic force microscope, has at least one source magnetic field and at least one magnetic field detector used to measure movement on-and-off of opposite sides of bending element

摘要

Sensor includes a bending element and a needle fastened to the bending element. At least one source magnetic field and at least one magnetic field detector e.g. SQUID are used to measure the movement on-and-off of the opposite sides of the bending element. An Independent claim is also included for a method of determining the movement of a sensor for an atomic force microscope.