Akustischer Spiegel und Verfahren zu dessen Herstellung

摘要

The acoustic mirror is essentially comprised of at least one first insulating layer (Il'), a first metal layer (M1') arranged thereon, a second insulating layer arranged thereon (I2') and a second metal layer (M2') arranged thereon. An auxiliary layer (H') is produced on the first insulating layer (I1') whereby a recess (V') extending as far as the first insulating layer (I1') is created therein. The first metal layer (M1') is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer (M1') arranged outside the recess (V') are no longer present. The second metal layer (M2') is also produced in a recess (V') with the aid of chemical/mechanical polishing. More than two insulating layers (I1', I2') and two metal layers (M1', M2') can be provided. The first metal layer (M1') and the second metal layer (M2') can be produced in the same recess (V').