发明名称 |
A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another |
摘要 |
<p>A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another provides for the formation of a layer of sacrificial material (32), the formation of the electrical connection elements (43) on the layer of sacrificial material, and the removal of the layer of sacrificial material beneath the electrical connecting elements, the layer of sacrificial material being a thin film (32) with at least one adhesive side (21) which can be applied dry to the surface of the micro-mechanism. <IMAGE></p> |
申请公布号 |
EP1089261(A1) |
申请公布日期 |
2001.04.04 |
申请号 |
EP19990830620 |
申请日期 |
1999.10.01 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
MURARI, BRUNO;VIGNA, BENEDETTO;MASTROMATTEO, UBALDO |
分类号 |
B81C1/00;B81B3/00;B81B5/00;G11B5/53;G11B7/12;G11B21/10;H02N1/00;(IPC1-7):G11B5/53;G11B7/135 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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