发明名称 |
PIEZOELECTRIC THIN FILM DEVICE, INKJET RECORDING HEAD USING THE DEVICE AND MANUFACTURING METHODS OF THE DEVICE AND THE HEAD |
摘要 |
<p>A piezoelectric thin film element D, in which a piezoelectric thin film 1 with first and second electrode films 2 and 3 respectively formed on its opposite surfaces in the thickness direction is held by a hold film 5, is fabricated by forming each film 1, 2, 3, and 5 on a film formation substrate 11 and removing the film formation substrate 11 by etching. Even when the hold film 5 is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film 1 is protected from damage by etchant because the first electrode film 2 which comes into contact with the film formation substrate 11 is formed such that the overall circumference of a peripheral edge portion of the first electrode film 2 laterally extends beyond the lateral surface of the piezoelectric thin film 1 and closely adheres to the hold film 5. <IMAGE></p> |
申请公布号 |
EP1089360(A1) |
申请公布日期 |
2001.04.04 |
申请号 |
EP20000915356 |
申请日期 |
2000.04.05 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
FUJII, SATORU;KANNO, ISAKU;TAKAYAMA, RYOICHI;WATANABE, OSAMU;TOMITA, KENJI;TAKAO, SHIGEYUKI |
分类号 |
B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L41/09;(IPC1-7):H01L41/09 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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