| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacture of high-precision micro parts utilizing energy beam. SOLUTION: This method for manufacturing high-precision micro parts comprises the steps of forming a lower photo resist layer, a conductive layer, and an upper photo resist layer on a substrate not varied by the radiation of light beam, setting an ultraviolet ray mask thereon, performing the radiation of ultraviolet ray, exposure, developing, and etching, manufacturing one mold hole in the photo resist layers, and filling the hole with metal by electro- galvanizing. The method further comprises the steps of removing residual upper photo resist layer and exposed conductive layer and performing the radiation of X-ray, exposure, and etching so as to provide a residual lower photo resist layers having a proper pattern. The residual lower photo resist layers are aligned overlappingly to provide these layers with a proper height, and then the electro-galvanizing is advanced so as to form an electro-galvanizing structure, and the overlapped residual lower photo resist layers are removed so as to provide a micro parts.
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