| 摘要 |
PROBLEM TO BE SOLVED: To deposit a carbon film having hardness and tight in adhesion to the face to be deposited which is composed of metal. SOLUTION: The face to be deposited composed of metal is deposited with a film of carbon or essentially consisting of carbon at a self-bias to a degree which does not give damage caused by sputtering thereto, and high-frequency energy is slowly increased to increase the hardness of the film. |
