| 摘要 |
PROBLEM TO BE SOLVED: To form graphite nanotubes on a substrate at a low cost and thereby to directly form a control circuit on the substrate by using a simple manufacturing equipment. SOLUTION: The manufacturing process of this substrate device comprises subjecting a substrate 8 consisting of SiC to heating and thermal decomposition in a vacuum atmosphere, to form carbon and adsorbing and depositing the resulting carbon only on metal parts 13 which are formed so as to shape a pattern on the substrate 8 beforehand and function as growth nuclei of the carbon, to produce graphite nanotubes 15 formed so as to shape an optional pattern on the substrate 8. |
