| 摘要 |
PROBLEM TO BE SOLVED: To enable a fine adjustment of pressing force against an object to be polished. SOLUTION: A reverse pressure generator 13 is provided in an elevatable arm 27 while an upper surface plate 2 is connected thereto. The generator 13 is constructed such that a rope 14 is laid around a rope pulley 20, one end of the rope 14 is connected to the upper surface plate 2 while the other end to a weight 15, and the weight of the weight 15 can be controlled. The plate 2 and the generator 13 are lowered in an integral manner with the arm 27 to make the plate 2 abut on a lower surface plate 1, then the weight 15 is separated from a lower plate of the arm 27 with the arm 27 finely controlled at its position, and a difference between the load caused by the self weight of the plate 2 and the load caused by the weight of the weight 15 acts as a pressing force on an object to be polished. The pressing force can be arbitrarily controlled by controlling the weight of the weight 15. |
