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发明名称
INSPECTION APPARATUS FOR PATTERN OF PRINTED CIRCUIT BOARD APPARATUS
摘要
申请公布号
JPH06249792(A)
申请公布日期
1994.09.09
申请号
JP19930039700
申请日期
1993.03.01
申请人
NEC CORP
发明人
INASUMI HITOSHI
分类号
G01B11/24;G01N21/88;G01N21/93;G01N21/956;G06F17/50;G06T1/00;G06T7/00;H05K3/00;(IPC1-7):G01N21/88;G06F15/60;G06F15/62
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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