发明名称 Semiconductor composite sensor
摘要 A semiconductor composite sensor using a plurality of semiconductor piezoresistive gauge elements connected in series. The piezoresistive elements are separated so that a high potential terminal of one of the resistive elements having the same resistance values and the substrate of the other of the resistive elements will be connected with equal potential values. Potential difference values between semiconductor regions serving as respective resistive elements and the substrates are made equal.
申请公布号 US6211772(B1) 申请公布日期 2001.04.03
申请号 US19970417235 申请日期 1997.09.05
申请人 HITACHI, LTD. 发明人 MURAKAMI SUSUMU;SHIMADA SATOSHI;UGAI SEIICHI;TAKAHASHI YUKIO;SHIMIZU SHUICHI
分类号 G01L9/04;G01L9/00;G01L13/06;H01L29/84;(IPC1-7):H01L10/10 主分类号 G01L9/04
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