| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro manipulation method for operating micro objects with high reproducibility and as intended in a microscope where an electron beam is radiated and, under magnification, the objects are observed utilizing secondary electrons, reflected electrons, and transmission electronic signals. SOLUTION: This micro manipulation method is formed so that micro objects are operated under the radiation of electron beams from an electron microscope using a micro operating instrument. The method is characterized in that the acceleration voltage of the electron beam, the potential of the micro operating instrument, and the potential of a working substrate are regulated, and the micro objects are arrested and released using the micro operating instrument.
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