| 发明名称 |
TOOL AND METHOD FOR POLISHING SUBSTANTIALLY FLAT SURFACE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved tool for polishing substantially flat surface and a method thereof to satisfy the requirement of quality in an easy and advantageous manner. SOLUTION: This tool has a base 1 and a plurality of elements 2. The elements are set in the base so as to be in a shape of flat cover which is used as a cover for work at the time of work. |
| 申请公布号 |
JP2001088038(A) |
申请公布日期 |
2001.04.03 |
| 申请号 |
JP20000246974 |
申请日期 |
2000.08.16 |
| 申请人 |
WACKER SILTRONIC G FUER HALBLEITERMATERIALIEN AG |
发明人 |
RIPPER BERT;GRUBMUELLER HUBERT |
| 分类号 |
B24B37/16;B24B37/26;B24B53/017;B24D7/00;B24D7/06;B24D7/10;H01L21/304 |
主分类号 |
B24B37/16 |
| 代理机构 |
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代理人 |
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| 主权项 |
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