发明名称 BAKING RESIN COMPOSITION, BAKING PHOTOSENSITIVE RESIN COMPOSITION, AND PROCESS FOR FORMING CERAMIC PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a baking resin composition capable of being baked even at a low temperature, especially a baking photosensitive resin composition, and to provide a process for forming a ceramic pattern using the photosensitive resin composition. SOLUTION: A baking resin composition or a baking photosensitive resin composition contains a resin and a metal peroxide and can give a ceramic pattern by processes comprising the forming of a layer of the photosensitive resin composition on a base board, then the light exposing and developing via a pattern mask, thus the forming on the base board of a resist pattern with unevenness, subsequently the filling of a ceramic material in the concave parts on the resist pattern, thereafter the baking of both the resist pattern and the ceramic material to thereby form the ceramic partition wall.
申请公布号 JP2001089671(A) 申请公布日期 2001.04.03
申请号 JP19990267867 申请日期 1999.09.22
申请人 NIPPON SYNTHETIC CHEM IND CO LTD:THE 发明人 NAKAJIMA HIROYUKI
分类号 H01J9/02;C08L101/06;G03F7/004;G03F7/40;H01J11/22;H01J11/34;H01J11/36 主分类号 H01J9/02
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