| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a silicon impregnated silicon carbide ceramic member, by which deformation and distortion or the occurrence of parts not impregnated in the silicon impregnation process are suppressed and the processability of the member is improved in comparison with the conventional methods. SOLUTION: The method of producing a silicon impregnated silicon carbide ceramic member comprises a process for adding >=2 and <=7 wt.% carbon powder having particle sizes of >=0.1 and <=1μm to a silicon carbide powder having the maximum particle size of <=115μm and an average particle size of >=10 and <=25, then mixing and compacting the mixed powder into a prescribed shape, a process for firing a compact at >=1,500 and <=2,300 deg.C under a non-oxidizing atmosphere to obtain a porous sintered compact having pore diameters of >=103 and <=104 nm, a process for impregnating high purity silicon into the porous sintered compact and reaction sintering the silicon and the carbon so that the volume expansion of the sintered compact is in the range of >=0.05 and <=0.15% at the impregnating process, and a process for coating the surface of the sintered compact obtained by the silicon impregnation treatment with a silicon carbide film by a CVD vapor growth method.
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