发明名称 Process of fabricating a bipolar transistor having lightly doped epitaxial collector region constant in dopant impurity
摘要 A bipolar transistor has a lightly doped n-type single crystal silicon layer epitaxially grown in a recess formed in a heavily doped n-type impurity region after a selective growth of a thick field oxide layer, a base region, an emitter region and a collector contact region are formed in surface portions of the lightly doped n-type single crystal silicon layer, and the single crystal silicon layer is not affected by the heat during the growth of the thick field oxide layer, and has a flat zone constant in dopant concentration regardless of the thickness thereof.
申请公布号 US6211029(B1) 申请公布日期 2001.04.03
申请号 US20000580855 申请日期 2000.05.30
申请人 NEC CORPORATION 发明人 KINOSHITA YASUSHI
分类号 H01L21/331;H01L29/08;H01L29/732;(IPC1-7):H01L21/331 主分类号 H01L21/331
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