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发明名称
摘要
申请公布号
JP3153162(B2)
申请公布日期
2001.04.03
申请号
JP19970275673
申请日期
1997.10.08
申请人
发明人
分类号
H01L29/78;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L29/78
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