发明名称 Semiconductor device, and method for manufacturing the same
摘要 A method for manufacturing a thin-film crystalline solar cell includes the steps of (i) forming a porous layer including a large number of fine pores in a surface portion of a crystalline substrate, (ii) transforming a part of the porous layer including the surface thereof into a smooth layer which does not include fine pores by providing the porous layer with excitation energy, and (iii) peeling the smooth layer from the substrate. The excitation energy is provided, for example, by performing heat treatment in a hydrogen atmosphere, irradiating with light having a wavelength equal to or less than 600 nm, or irradiating with an electron beam. It is thereby possible to form a thin-film crystalline semiconductor layer on an inexpensive and flexible substrate by simple processes.
申请公布号 US6211038(B1) 申请公布日期 2001.04.03
申请号 US19980047325 申请日期 1998.03.25
申请人 CANON KABUSHIKI KAISHA 发明人 NAKAGAWA KATSUMI;YONEHARA TAKAO;NISHIDA SHOJI;SAKAGUCHI KIYOFUMI;IWASAKI YUKIKO
分类号 H01L31/04;H01L21/20;H01L21/762;(IPC1-7):H01L21/76 主分类号 H01L31/04
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