PRODUCING ELECTRIC ARC PLASMA IN A CURVILINEAR PLASMAGUIDE AND SUBSTRATE COATING

摘要

The present invention relates to a method and apparatus for producing electric arc plasma and for use thereof for depositing coatings on a substrate. Electric arc separated plasma is produced using electric arc discharge on a cold cathode by passing it through a curvilinear plasmaguide. Said plasma is created within the curvilinear plasmaguide and electric current is put through it in a longitudinal direction forming length-uniform magnetic field whereby allowing a high-quality coating to be deposited on the substrate using sputtering.