| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage drive apparatus, in which the vibrations of a piezoelectric member are not directly transmitted to a stage. SOLUTION: In this stage drive apparatus 1, a first guide 5 retains a stage 6 movably, and a second guide 15 retains a moving part 16 movably. The moving part 16 has a resonant piezoelectric actuator. A linking part 19, which links the moving part 16 having the stage 6, has engaging parts 9, 20 and a hydrostatic bearing positioned between the engaging parts 9 and 20. A bearing resonant frequency of the hydrostatic bearing is set lower than that of a piezoelectric actuator. As a result, vibration of the piezoelectric actuator is absorbed by the hydrostatic bearing and attenuated, so that the stage 6 is moved with accuracy.</p> |
