| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a compact laser device which is easy in maintenance, for which when the laser beam irradiation is started, the output may not vary by optical surges. SOLUTION: A laser beam LB1 from a single wavelength oscillation laser 11 is fed through an optical modulation element 12 to an optical fiber amplifier 13, the amplified laser beam is split via splitters 14, 16-1 to 16-m, etc., amplified by optical amplifier units 18-1 to 18-n, bundled into an optical fiber bundle 19, and converted into an UV laser beam LB5 by a wavelength converter 20. During outputting of the UV beam, the device outputs a pulse beam from the optical modulation element 12, and even during the period the UV light is not output, it outputs a laser beam at approximately the same mean output power as in the UV light outputting period from the optical modulation element 12 but at a considerably low peak level.</p> |
