| 摘要 |
PROBLEM TO BE SOLVED: To enable an X-ray inspection device to separately recognize parts respectively mounted on the upper and lower surfaces of a printed board mounted with the parts on both surface and components, such as solder, etc., formed on the surfaces. SOLUTION: An X-ray inspection device is provided with an X-ray source 4 which projects X rays upon objects 2 and 3, a sensor 5 which receives the X-ray images of the objects 2 and 3, and a supporting means which supports the X-ray source 4 in such a way that the source 4 can perpendicularly project the X rays upon the objective surfaces of the objects 2 and 3 and can project the X rays upon the objective surfaces of the objects 2 and 3 from an oblique direction which is shifted by a fixed angle from the perpendicular direction. The inspection device is also provided with a comparing means which compares the image photographed when the X rays are perpendicularly projected with the image photographed when the X-rays are obliquely projected and an information computing means which computes the information on the compared images. When the objects 2 and 3 are mounted at the same position on the upper and lower surfaces of a both-sided mounting substrate 1, the substrate 1 can be inspected with a relatively simple constitution, because the images of the upper and lower surfaces can be separated from each other by only changing the projecting direction of the X rays upon the objects 2 and 3.
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