| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the chip of the chamfered part of a semiconductor substrate, regardless of the skill of an inspector. SOLUTION: This evaluator has a measuring thread 12 which is adjusted, so that it can be pushed against the chamfered part of a semiconductor substrate 1 being provided with a chamfered part 2 at its periphery, and a tension measuring apparatus 13 which measures the tension working on the measuring thread at relative shifting between this measuring thread and the semiconductor substrate.
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