| 摘要 |
PROBLEM TO BE SOLVED: To provide a damping structure for an objective lens supporting device with which pitching resonance of a movable member is shifted to a low frequency without lowering a primary resonance frequency and further, the pitching resonance is suppressed. SOLUTION: This objective lens supporting device is provided with a supporting member 9 for hanging and supporting the movable member, which has an objective lens 5 defining a Z-axis direction as a focus direction, through plural elastic supporting parts 3 extended in an X-axis direction movably in Y-axis and Z-axis directions and a pedestal 1a to which its supporting member 9 is connected, one end of the elastic supporting member 3 on the side of the movable member is connected to a connecting substrate 13 linked through a hinge 14, which has a degree of freedom in deformation around an axis parallel with the Y axis, to the movable member.
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