发明名称 LIGHT SOURCE SYSTEM, ALIGNER AND METHOD THEREFOR, AND DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To obtain a light source system by which the control of the quantity of light in response to requirements necessary for control can be performed. SOLUTION: This light source system 16 is provided with a lightgenerating part 160, having a single wavelength generating light source 160A and a light modulator 160C for converting the light from the light source into a pulse light and outputting it, a light-amplifying part 161 comprised of a group of optical fibers, each having a fiber amplifier for amplifying the pulse light from the light modulator and a light amount control device 160C. The light amount control device 160C conducts a step-by-step light amount control through individual turn on and off of each light output which constitutes the group of optical fibers and light amount control by controlling at least one of the output pulse light frequency and the peak power. Accordingly, in addition to the step-by-step light amount control, fine tuning of light amount between steps is possible, by controlling at least one of the frequency of pulse light and the peak power and the light amount can be made to watch whatever set light amount, if it is within a prescribed reage.
申请公布号 JP2001085306(A) 申请公布日期 2001.03.30
申请号 JP19990257969 申请日期 1999.09.10
申请人 NIKON CORP 发明人 OTSUKI TOMOKO;ATSUMI TSUGUKAZU
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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