摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a transparent electrode film, having desired conductive performance and both reduction resistance and heat resistance for improving power generating efficiency, without generating defects in a power generating film to be laminated on this, and a solar battery using this method. SOLUTION: In this method for manufacturing a transparent electrode film, a process fluid with the steam of tin tetrachloride (SnCl4) and steam (H2O) as main materials, to which hydrofluoric(HF) gas is doped in a mol ratio of 0.5 or more to the steam of the tin tetrachloride, is mode to act in a state that a substrate or a substrate to which a thin film lower layer is attached, is heated and held in a temperature ranging from 420 deg.C to 500 deg.C. Thus, a transparent electrode film having tin oxide as the main components can be formed on the substrate or the substrate, to which the thin film lower layer is adhered. |