发明名称 METHOD FOR MANUFACTURING TRANSPARENT ELECTRODE FILM AND SOLAR BATTERY
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a transparent electrode film, having desired conductive performance and both reduction resistance and heat resistance for improving power generating efficiency, without generating defects in a power generating film to be laminated on this, and a solar battery using this method. SOLUTION: In this method for manufacturing a transparent electrode film, a process fluid with the steam of tin tetrachloride (SnCl4) and steam (H2O) as main materials, to which hydrofluoric(HF) gas is doped in a mol ratio of 0.5 or more to the steam of the tin tetrachloride, is mode to act in a state that a substrate or a substrate to which a thin film lower layer is attached, is heated and held in a temperature ranging from 420 deg.C to 500 deg.C. Thus, a transparent electrode film having tin oxide as the main components can be formed on the substrate or the substrate, to which the thin film lower layer is adhered.
申请公布号 JP2001085722(A) 申请公布日期 2001.03.30
申请号 JP19990263725 申请日期 1999.09.17
申请人 MITSUBISHI HEAVY IND LTD 发明人 YONEKURA YOSHIMICHI
分类号 H01L31/04;H01L21/28;H01L21/285;H01M14/00 主分类号 H01L31/04
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