SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To carry out observation for both the observation of a sample image (secondary electron image) and an X-ray analysis with a low-magnification mode of in-lens type. SOLUTION: A first low-magnification mode for setting an object lens current to zero or a weak excitation value and a second low-magnification mode for setting the object lens current by changing it to a current value proportional to the square root of an acceleration voltage are provided. Normal sample image (secondary electron image) observation is carried out with the first low- magnification mode, and it is switched over to the second low-magnification mode in an X-ray analysis.