| 摘要 |
PROBLEM TO BE SOLVED: To inspect a conductor pattern and a hole without being affected by the fluctuation of a hole position. SOLUTION: A first master pattern to be the reference of a conductor pattern inspection is prepared from pattern data at the time of design and a second master pattern to be the reference of a hole inspection is prepared from hole data. The first master pattern and the pattern to be measured are positioned so as to match a coordinate system of the conductor pattern, they are compared and the conductor pattern is inspected (step 107). The second master pattern and the pattern to be measured are positioned so as to match the coordinate system of the hole, they are compared and the hole is inspected (step 108). The second master pattern and the pattern to be measured are positioned so as to match the coordinate system of the conductor pattern and the position deviation of the hole is inspected (step 109). |
