METHOD AND DEVICE FOR PROCESSING PIEZOELECTRIC VIBRATION CHIP

摘要

PROBLEM TO BE SOLVED: To obtain a piezoelectric vibrator with high precision by decreasing the adjustment amount of a frequency in a 1st process so as to attain precise frequency adjustment in the case of frequency adjustment with laser beam. SOLUTION: In this frequency adjustment method, a piezoelectric vibration chip 13 is contained in a package 18 at least part of which is made of a transparent material and the laser beam is emitted to a metallic coating film 13b of a prescribed metallic coating film section of the piezoelectric vibration chip 13 externally through a transmissive material 16 to apply trimming to the metallic coating film 13b. In this case, the power of the laser beam from a light source is adjusted and the wavelength of the laser beam is selected to 700 nm or below and a beam focusing means with a short focus focuses the beam emitted to the metallic coating film.