SUSCEPTOR AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To obtain a susceptor which can surely apply a current to an internal electrode included in the susceptor, and a manufacturing method of a susceptor, which can manufacture the susceptor at a low cost, with high yield. SOLUTION: In this manufacturing method, fixing holes 16, 16 are formed in a retaining plate 13, and terminals 14, 14 for supplying power, composed of an aluminum nitride-tungsten compound conductive sintered body fixed in the holes 16, 16 penetrating the retaining plate 13. A coating material, composed of an aluminum nitride-tungsten compound conductive material, is spread on the retaining plate 13 in contact with the terminals 14 and then dried. A mount plate 11 is stacked on the retaining plate 13 interposing the coated surface. The plates are heat-treated under pressure and unified to one body. An internal electrode 12 composed of the aluminum nitride-tungsten compound conductive sintered body is formed, and a susceptor 15 is obtained.