发明名称 |
PROCEDE POUR EMPECHER LA DIFFUSION DE BORE DANS UN SILICIUM PAR IMPLANTATION IONIQUE DE CARBONE |
摘要 |
The invention concerns a method for preventing the diffusion of boron present as a dopant in a predetermined region of a semiconductor component into at least an region adjacent to the predetermined region while making the component. The method consists in introducing by ion implantation in the predetermined region a dose of carbon ranging between 0.1 and 1 atom %. For a heterojunction bipolar transistor, said process is carried out after the base is formed.
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申请公布号 |
FR2799049(A1) |
申请公布日期 |
2001.03.30 |
申请号 |
FR19990012115 |
申请日期 |
1999.09.29 |
申请人 |
FRANCE TELECOM |
发明人 |
REGOLINI JORGE LUIS;RIBOT PASCAL;MORIN CHRISTINE |
分类号 |
H01L21/265;H01L21/331;(IPC1-7):H01L21/331;H01L29/737 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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