| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of dust and flows by fixing a porous material with a plane part in an upper part of a main body, whereto pressure liquid is fed with its plane part up for blowing pressure liquid through a porous material, and providing a roller which drives both sides of a plate-like part. SOLUTION: When a cleaning liquid is supplied from a cleaning liquid pipe 11 and a plate-like member 1 is positioned on a porous material 10, a cleaning liquid layer is formed between the porous material 10 and the plate-like member 1, and the plate-like member 1 floats on the porous ceramics material 2 in its noncontact state. In the state, carrier rollers 4, 5 are brought into contact with both end parts of the plate-like member 1. Then, the plate-like member 1 moves horizontally by rotating driving force of the carrier rollers 4, 5, and when rotation of the carrier rollers 4, 5 is stopped, the movement of a plate-like member also stops. As a result, it is possible to raise a plate-like member in its noncontact state, to carry it by a small force and to obtain a cleaning device of a plate-like member of high producibility without generating dust or flaws. |
