SCANNING ELECTRON MICROSCOPE PROVIDED WITH SAMPLE- CHANGING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope provided with a highly reliable holding and dismounting mechanism allowing a sample to be changed on a sample table and a sample transfer device which allow the sample table to be easily be extracted from a sample changing chamber and replaced. SOLUTION: This scanning electron microscope provided with a sample transfer device. The microscope is so structured that when a lever receiver mounted to a lever (sample) in a sample table 6 is moved from the tilt part of a spring-pushed lever in a sample changing chamber 8 to a parallel part thereof by the movement of the sample table 6, the lever (sample) is rotated, and the sample stopper separates from the sample 11 and moves to the sample transfer device 9, and the sample table 6 can be changed by mounting a push catch allowing it to be mounted to and dismounted from the spring-pushed lever and by combining them with each other.