发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a resistance element having a high resistance accuracy, resistant to coupling noises from adjacent wirings and superior in substrate follow-up property. SOLUTION: The device has a resistance element 6 formed on a resistance element forming region 17 of a Si substrate 1, using a wiring layer 20 formed at the same time as forming a gate electrode 12 of a MOS type transistor 22 constituting a memory cell in a transistor forming region 18 of the substrate 1 when forming the resistance element 6.
申请公布号 JP2001085617(A) 申请公布日期 2001.03.30
申请号 JP19990255962 申请日期 1999.09.09
申请人 NEC CORP 发明人 OTA MASARU
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L23/522;H01L27/02;H01L27/06;H01L27/108 主分类号 H01L27/04
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